Multilayer sensor structure based on porous silicon
نویسندگان
چکیده
The work is devoted to the creation of a sensor structure based on porous silicon membrane. under study integrates layer used as gas transport and sensitive non-stoichiometric tin oxide. paper investigates morphology shows permeability membrane silicon. sensitivity test obtained by passing gas-air mixture containing NO 2 has been studied. Keywords: silicon, membrane, oxide, thin films, resistive sensor.
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ژورنال
عنوان ژورنال: Fizika i tehnika poluprovodnikov
سال: 2022
ISSN: ['0015-3222', '1726-7315']
DOI: https://doi.org/10.21883/sc.2022.06.53542.9819